The combination of evaporative coating and glove box realizes fully enclosed production of evaporation, packaging, testing and other processes, making the entire film growth and device preparation process highly integrated in a complete and controllable system. eliminate the influence of unstable factors in the atmospheric environment in the process of organic large area circuit preparation, and ensure the preparation of high performance and large area organic optoelectronic devices and circuits.

• Applicable for metal, semi-conductor, and organic film, OLED, PLED, solar, perovskite cell and other applications.

• Integrated with evaporator and spin coater.

• With ultra-clean purification system on the top.

  Cleanliness level reached to 10.

  High efficiency filter H13 grade to ultra-high efficiency filter U15 grade.

  Filtration particle size: 0.12μm.